Method for manufacturing semiconductor device

A method for manufacturing a semiconductor device in which a semiconductor chip on a circuit substrate is sealed with a resin, the method comprising:

• temporarily securing the semiconductor chip to the circuit substrate with a thermosetting adhesive film interposed therebetween;
• disposing on the temporarily secured semiconductor chip a sealing resin film including a release film and a thermosetting sealing resin layer that is laminated on the release film and has a thickness of 0.3 to 2 times a thickness of the semiconductor chip, the sealing resin film being disposed such that the thermosetting sealing resin layer faces the semiconductor chip;
• bonding and securing the semiconductor chip to the circuit substrate and simultaneously sealing the semiconductor chip with the resin by applying heat from a side on which the circuit substrate is disposed while a pressure is applied by a rubber head having a rubber hardness of from 5 to 100 from a side on which the release film is disposed;
• and
• peeling off the release film on a front side, wherein
• the following inequalities (1) and (2) are satisfied where Ae is a linear expansion coefficient of the thermosetting sealing resin layer of the sealing resin film, Am is an elastic modulus of the thermosetting sealing resin layer, Be is a linear expansion coefficient of the thermosetting adhesive film, and Bm is an elastic modulus of the thermosetting adhesive film;
• 0<Be/Ae≦2.25, and (1)
• 0<Am/Bm≦3.5 (2).