Method of producing a sputter target material

A method of producing a sputter target material, which comprises the steps of:

• blending raw powders of Mo and at least one metal element (M) selected from the group consisting of Ti, Zr, V, Nb and Cr;
• compressing the blended raw powders by a cold isostatic pressing method to form a green compact of the blended raw powder;
• pulverizing the green compact of blended raw powder to produce a secondary powder having an average particle size of not more than 5.0 mm;
• filling the secondary powder into a pressurizing container;
• and
• sintering the secondary powder as contained in the pressurizing container under pressure, thereby obtaining the sputter target material,
• wherein the sputter target material has a micostructure seen at a perpendicular cross section to a sputtering surface, in which microstructure oxide particles exist around each island of the metal element (M), and wherein the maximum area of the island, which is defined by connecting the oxide particles with linear lines so as to form a closed zone, is not more than 1.0 mm2.