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US 8,409,348 B2Granted
Production method of zinc oxide single crystal
AssigneeUbe Industries, Ltd.
InventorsYoshizumi Tanaka, Itsuhiro Fujii
Life of this patent
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Abstract
A production method of a zinc oxide single crystal, comprising depositing a crystal of zinc oxide on a seed crystal from a mixed melt of zinc oxide and a solvent capable of melting zinc oxide and having a higher average density than zinc oxide in the melt. Preferably, a zinc oxide single crystal is continuously pulled while supplying the same amount of a zinc oxide raw material as that of the pulled zinc oxide. A single crystal excellent in the crystal quality and long in the pulling direction can be continuously produced.
Claims19
A method of producing a zinc oxide single crystal by pulling from a melt comprising:
- depositing a crystal of zinc oxide on a seed single crystal at an upper portion of and from a mixed melt of zinc oxide and a solvent that melts zinc oxide by cooling said mixed melt, said solvent being formed of one or more kinds of compounds forming a eutectic phase diagram with zinc oxide as the solute, said solvent having a higher density than zinc oxide in the melt, and
- pulling the zinc oxide crystal,
- wherein a same amount of a zinc oxide raw material as that of the zinc oxide is supplied during said pulling to continuously pull a zinc oxide single crystal.
Dependencies are inferred from the claim text.