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US 8,408,858 B2Granted
Substrate processing system having improved substrate transport system
AssigneeAscentool International
InventorsGeorge X. Guo, Kai-an Wang
Life of this patent
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Abstract
A substrate processing system includes a first load lock, a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, first rollers in the process chamber; and second rollers in the first load lock, wherein the first rollers and the second rollers are configured to transport a substrate thereon through the first opening between the first load lock and the process chamber. At least some of the first rollers and the second rollers are idler rollers.
Claims20
A substrate processing system, comprising:
- a first load lock;
- a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, wherein the first load lock is fixed to the process chamber throughout operation;
- first rollers in the process chamber;
- second rollers in the first load lock;
- and
- a first transport mechanism configured to move the second rollers in translational movements relative to the first load lock, wherein the first rollers and the second rollers are configured to transport a substrate thereon through the first opening between the first load lock and the process chamber, wherein at least some of the first rollers and the second rollers are idler rollers,
- wherein at least one of the first load lock and the process chamber is configured to tilt to a first tilt angle to allow the substrate to move under gravitation on the first rollers and the second rollers from the first load lock to the process chamber, and wherein at least one of the first load lock and the process chamber is configured to tilt to a second tilt angle to allow the substrate to move under gravitation on the first rollers and the second rollers from the process chamber to the first load lock.
4 more elements
A substrate processing system, comprising:
- a first load lock;
- a process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, wherein the first load lock is fixed to the process chamber throughout operation;
- first rollers in the process chamber;
- a first stack of second rollers in the first load lock;
- a second stack of second rollers in the first load lock, wherein the second stack of second rollers are at a different height from the first stack of rollers, wherein the first rollers and the first stack of the second rollers are configured to transport a first substrate thereon through the first opening between the first load lock and the process chamber, and wherein the first rollers and the second stack of the second rollers are configured to transport a second substrate thereon through the first opening between the first load lock and the process chamber;
- a first transport mechanism configured to move the first stack of second rollers and the second stack of second rollers relative to the first load lock, wherein the first transport mechanism is configured to move the first stack of second rollers and the second stack of second rollers in translational movements relative to the first load lock,
- wherein at least one of the first load lock and the process chamber is configured to tilt to allow the substrate to move under gravitation on at least one of the first rollers and the second rollers;
- and
- a third transport mechanism, wherein at least one of the first rollers, the first stack of second rollers, and the second stack of the second rollers is an active roller that is configured to be rotated by the third transport mechanism.
6 more elements
A substrate processing system, comprising:
- a first load lock;
- a first process chamber having a first opening to allow an exchange of a substrate between the first load lock and the first process chamber, wherein the first load lock is fixed to the process chamber throughout operation;
- a second process chamber having a second opening to allow an exchange of the substrate between the first process chamber and the second process chamber;
- a second load lock having a second opening to allow an exchange of the substrate between the second load lock and the second process chamber;
- first rollers in the first load lock, wherein the first rollers are configured to be moved in translational movements relative to the first load lock;
- second rollers in the first process chamber, wherein the first rollers and the second rollers are configured to transport the substrate thereon through the first opening between the first load lock and the first process chamber;
- third rollers in the second process chamber, wherein the second rollers and the third rollers are configured to transport the substrate thereon through the second opening between the first process chamber and the second process chamber;
- and
- fourth rollers in the second load lock, wherein the third rollers and the fourth rollers are configured to transport the substrate thereon through the third opening between the second process chamber and the second load lock, wherein at least some of the first rollers, the second rollers, the third rollers, and the fourth rollers are idler rollers,
- wherein the first load lock, the first process chamber, the second process chamber, and the second load lock are configured to tilt to allow the substrate to move under gravitation on at least one of the first rollers, the second rollers, the third rollers, and the fourth rollers.
7 more elements
Dependencies are inferred from the claim text.