Micro bubble generating device and silicon wafer cleaning apparatus
AssigneeSiltronic AG
InventorTeruo Haibara
Life of this patent
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Abstract
A micro-bubble generating device is provided with a micro-bubble generating mechanism and a leading conduit provided with a widening section and a tube part, the widening section and the tube part in communication with each other in the leading conduit. The widening section has a hollow shape which has an axis Z as a central axis, and has base surfaces and a peripheral surface, and communicates with a nozzle of the micro-bubble-generating mechanism via one base surface of the widening section, and communicates with the tube part via the other base surface. The cross section orthogonal to a flow axis Z of the micro-bubbles of the widening section is larger than the cross section orthogonal to the flow axis Z of the tube part.
Claims9
A micro-bubble generating and stabilizing device, comprising:
- a) a micro-bubble generating mechanism into which gas and liquid flow, generating gas micro-bubbles and having an exit nozzle;
- b) a leading conduit having a widening section into which microbubbles entrained in liquid are directly introduced from said exit nozzle, and a tube part, wherein the widening section is larger in flow passage cross-sectional area than the tube part, thereby configured to stabilize the generated microbubbles.
Dependencies are inferred from the claim text.