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US 8,378,757 B2Granted
Resonator using carbon nano substance and method of manufacturing resonator
AssigneesSamsung Electronics Co., Ltd., Industry-Academic Cooperation Foundation, Yonsei University
InventorsJea Shik Shin, Seong Chan Jun, Yun Kwon Park, In Sang Song, Young Il Kim, Duck Hwan Kim, Chul Soo Kim
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Abstract
A resonator and a method of manufacturing a resonator are provided. The resonator includes a sacrificial layer formed on a substrate, and a resonant structure formed on the sacrificial layer, the resonant structure comprising a carbon nano-substance layer and a silicon carbide layer.
Claims20
A resonator, comprising:
- a sacrificial layer on a substrate;
- and
- a resonant structure on the sacrificial layer, the resonant structure comprising three layers comprising one or more carbon nano-substance layers and one or more silicon carbide layers.
A method of manufacturing a resonator, the method comprising:
- forming a sacrificial layer on a substrate;
- forming a structure on the sacrificial layer, the structure comprising three layers comprising one or more carbon nano-substance layers and one or more silicon carbide layers;
- forming a resonant structure, comprising etching the formed structure;
- and
- etching the formed sacrificial layer to space a region of the resonant structure apart from the substrate.
2 more elements
A method of manufacturing a resonator, the method comprising:
- forming a sacrificial layer on a substrate;
- and
- forming a resonant structure on the sacrificial layer, the resonant structure comprising three layers comprising one or more carbon nano-substance layers and one or more silicon carbide layers.
Dependencies are inferred from the claim text.