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US 8,336,188 B2Granted
Thin wafer chuck
AssigneeFormFactor, Inc.
InventorsBjorn Monteen, Kuan Yong Ho
Life of this patent
Estimating the term…
Abstract
Methods and systems, in one embodiment, are described related to a chuck with a plurality of vacuum grooves on a surface. Each single vacuum groove of the plurality of vacuum grooves has a single port connected with a single vacuum line coupled to a vacuum source. The single vacuum line is not shared with another groove and a restriction is applied to the single vacuum line in order to isolate each single vacuum groove.
Claims12
An apparatus comprising:
- a chuck with a plurality of vacuum grooves on a surface, each single vacuum groove of the plurality of vacuum grooves having a single port connected with a single vacuum line coupled to a vacuum source, the single vacuum line not being shared with another groove, wherein a restriction is applied to the single vacuum line in order to isolate each single vacuum groove;
- at least one sensor connected with the single vacuum line, the at least one sensor configured to determine when a pressurized vacuum region is created within the single vacuum groove that is associated with the single vacuum line;
- and
- a blower system configured to activate a blower to create a downward pressure in response to the at least one sensor.
1 more element
A system comprising:
- a base supported by a frame;
- a stage supported by the base and configured to be moveable relative to the frame;
- a chuck coupled to the stage and configured to support an object, the chuck having a plurality of vacuum grooves on a surface, each single vacuum groove of the plurality of vacuum grooves having a single port connected with a single vacuum line coupled to a vacuum source, the single vacuum line not being shared with another groove, wherein a restriction is applied to the single vacuum line in order to isolate each single vacuum groove;
- at least one sensor coupled with the single vacuum line, the at least one sensor configured to determine when a pressurized vacuum region is created within the single vacuum groove that is associated with the single vacuum line;
- and
- a blower system configured to activate a blower to create a downward pressure on the object supported by the chuck in response to the at least one sensor.
3 more elements
Dependencies are inferred from the claim text.