Micromechanical resonator

A micromechanical resonator comprising:

• a movable mass structure;
• and
• a spring structure, comprising a spring element, the spring element anchored from one end and connected to a plurality of electrode fingers on another end, wherein the plurality of electrode fingers are operatively connected together at the other end of the spring element, wherein resonant frequencies of the electrode fingers are two to five times higher than a resonant frequency of the micromechanical resonator.

A micromechanical resonator comprising:

• a movable mass structure;
• and
• a spring structure, comprising a spring element, the spring element anchored from one end and connected to a plurality of electrode fingers on another end, wherein the plurality of electrode fingers are operatively connected together at the other end of the spring element, wherein widths of the electrode fingers are dimensioned so that a slope of a resonant frequency change with respect to dimensional manufacturing variation change approaches zero at two or more locations.

A micromechanical resonator comprising:

• a movable mass structure;
• and
• a spring structure, comprising a spring element, the spring element anchored from one end and connected to a plurality of electrode fingers on another end, wherein the plurality of electrode fingers are operatively connected together at the other end of the spring element, wherein in dimensioning widths of the electrode fingers, an effect of bending of the electrode fingers is taken into account.

A micromechanical resonator comprising:

• a movable mass structure;
• and
• a spring structure, comprising a spring element, the spring element anchored from one end and connected to a plurality of electrode fingers on another end, wherein the plurality of electrode fingers are operatively connected together at the other end of the spring element, wherein lengths of the electrode fingers are dimensioned so that electrode finger resonant frequency affects a resonant frequency of the micromechanical resonator to generate a localized maximum of a micromechanical resonator resonant frequency change with respect to dimensional manufacturing variation change.