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AssigneeInternational Business Machines Corporation
InventorsHoward S. Landis, David Parker, Jeanne-Tania Sucharitaves
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A method, system and program product for replacing isotropic hole shapes in a wiring layout with non-equiaxial hole shapes that are arranged in a direction of current flow, which increases current flow along the wire's longitudinal axis while decreasing current flow along the wire's transverse axis. One aspect of the invention includes a method including determining a direction of electrical current flow in a portion of a wiring layout; and placing at least one non-equiaxial hole shape within the portion of the wiring layout, wherein the non-equiaxial hole shape is arranged in the direction of electrical current flow. The invention accommodates the limitations of copper CMP within an automated tool without sacrificing the efficiency of a hand-tuned layout. The invention also includes a semiconductor device including at least one non-equiaxial hole shape.
A method comprising:
A system comprising:
A computer program product comprising a computer readable medium having computer program code embodied therein, the program product comprising:
Dependencies are inferred from the claim text.