Microstructure with reactive bonding

A method of producing a microstructure having at least one bonding substrate and a reactive multilayer system, the method which comprises:

• for forming the reactive multilayer system, patterning at least one surface layer of the bonding substrate or depositing the at least one surface layer in patterned fashion to form vertically oriented nanostructures spaced apart from one another;
• and
• filling regions between the nanostructures with at least one material constituting a reaction partner with respect to the material of the nanostructures.

A microsystem, comprising:

• two bonding substrates and a construction between said bonding substrates, said construction having a reacted reactive layer system;
• said reacted reactive layer system being a reacted structure sequence composed of at least one surface layer, provided on at least one of the bonding substrates, with vertically oriented nanostructures spaced apart from one another, and regions filled between the nanostructures with at least one material constituting a reaction partner with respect to a material of the nanostructures;
• the microsystem being a sensor coated with biomaterial and/or having elements of polymeric material and/or at least one component selected from the group consisting of a magnetic component, a piezoelectric component, and a piezoresistive component.