Silicon wafer with controlled distribution of embryos that become oxygen precipitates by succeeding annealing and its manufacturing method
AssigneesSiltron Inc., Hynix Semiconductor Inc.
InventorsHyung-Kook Park, Jin-Kyun Hong, Kun Kim, Chung-Geun Koh
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Abstract
A method for making a silicon wafer includes the steps of generating and stabilizing embryos that become oxygen precipitates by succeeding thermal annealing applied during a semiconductor device manufacturing process. In the silicon wafer, embryos are substantially removed in a denuded zone, and embryos are distributed at a relatively higher concentration in a bulk region. Also, by controlling behaviors of embryos, a silicon wafer having a desired concentration profile of oxygen precipitates by succeeding thermal annealing is manufactured with high reliability and reproducibility.
Claims10
A method for manufacturing a silicon wafer, comprising:
- preparing a wafer having a front surface, a rear surface and a rim edge connecting the front and rear surfaces;
- generating embryos, which become oxygen precipitates by succeeding annealing, in the silicon wafer;
- stabilizing the embryos generated in the silicon wafer;
- and
- removing defects and the embryos existing within a predetermined depth from the front and rear surfaces of the silicon wafer, after the step of stabilizing the embryos,
- wherein the step of generating embryos is conducted in a way of thermally annealing the silicon wafer at a first temperature,
- wherein the step of stabilizing the embryos is conducted in a way of thermally annealing the silicon wafer with the embryos at a second temperature,
- wherein the step of removing defects and the embryos is conducted in a way of thermally annealing the silicon wafer at a third temperature higher than the first temperature, and
- wherein the thermal annealing executed at the first temperature and the thermal annealing executed at the second temperature are conducted for 1 to several ten seconds, respectively.
Dependencies are inferred from the claim text.