Coating material for photoresist pattern and method of forming fine pattern using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJoon-Seok Oh, Ju-Young Kim
Life of this patent
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Abstract
A coating material for a photoresist pattern includes a water-soluble polymer and an additive mixed with the water-soluble polymer. The additive may be at least one selected from the group represented by Formulas 1 and 2: wherein X and Y respectively represent one selected from a heteroatom group consisting of N, O and S, and R1 to R8 respectively represent one selected from an electron donating group consisting of an alkyl group and —H, and wherein X and Y respectively represent one selected from a heteroatom group consisting of N, O and S, and R1 to R7 respectively represent one selected from an electron donating group consisting of an alkyl group and —H.
Claims3
A coating material for a photoresist pattern comprising:
- a water-soluble polymer;
- and
- an additive mixed with the water-soluble polymer,
- wherein the additive is at least one selected from the group consisting of 2-(methylamino)ethanol, 2-methoxy-N-methylethanamine, 2-methoxy-N,N-dimethylethanamine, 2-ethoxy-N-methylethanamine, 2-ethoxy-N,N-dimethylethanamine, N-methyl-2-propoxyethanamine, N,N-dimethyl-2-propoxyethanamine, 2-isopropoxy-N-methylethanamine, 2-isopropoxy-N,N-dimethylethanamine, N-ethyl-2-isopropoxyethanamine, 2-(ethylamino)ethanol, N-ethyl-2-methoxyethanamine, 2-ethoxy-N-ethylethanamine, N,N-diethyl-2-isopropoxyethanamine, N,N-diethyl-2-methoxyethanamine, 2-ethoxy-N,N-diethylethanamine, 2-(diethylamino)ethanol, 2-isopropoxyethanamine, 2-methoxyethanamine, 2-ethoxyethanamine, 2-aminoethanol, 2-aminoethanethiol, 2-(methylthio)ethanamine, 2-(ethylthio)ethanamine, 2-(isopropylthio)ethanamine, 2-(isopropylthio)ethanamine, 2-(methylamino)ethanethiol, N-methyl-2-(methylthio)ethanamine, 2-(ethylthio)-N-methylethanamine, 2-(isopropylthio)-N-methylethanamine, 2-(isopropylthio)-N-methylethanamine, 2-(ethylamino)ethanethiol, N-ethyl-2-(methylthio)ethanamine, N-ethyl-2-(ethylthio)ethanamine, N-ethyl-2-(isopropylthio)ethanamine, N-ethyl-2-(isopropylthio)ethanamine, 2-(diethylamino)ethanethiol, N,N-diethyl-2-(methylthio)ethanamine, N,N-diethyl-2-(ethylthio)ethanamine, N,N-diethyl-2-(isopropylthio)ethanamine, and N,N-diethyl-2-(isopropylthio)ethanamine,
- wherein the water-soluble polymer is represented by Formula 3:
- wherein k, m and n respectively represent an integer of 1 to 100, and wherein R1 is acetyl, and R2 is acetal.
A coating material for a photoresist pattern comprising:
- a water-soluble polymer;
- a cross-linking agent;
- an additive;
- and
- water, and wherein the water, the water-soluble polymer, the cross-linking agent and the additive are mixed together,
- wherein the additive is at least one selected from the group consisting of 2-(methylamino)ethanol, 2-methoxy-N-methylethanamine, 2-methoxy-N,N-dimethylethanamine, 2-ethoxy-N-methylethanamine, 2-ethoxy-N,N-dimethylethanamine, N-methyl-2-propoxyethanamine, N,N-dimethyl-2-propoxyethanamine, 2-isopropoxy-N-methylethanamine, 2-isopropoxy-N,N-dimethylethanamine, N-ethyl-2-isopropoxyethanamine, 2-(ethylamino)ethanol, N-ethyl-2-methoxyethanamine, 2-ethoxy-N-ethylethanamine, N,N-diethyl-2-isopropoxyethanamine, N,N-diethyl-2-methoxyethanamine, 2-ethoxy-N,N-diethylethanamine, 2-(diethylamino)ethanol, 2-isopropoxyethanamine, 2-methoxyethanamine, 2-ethoxyethanamine, 2-aminoethanol, 2-aminoethanethiol, 2-(methylthio)ethanamine, 2-(ethylthio)ethanamine, 2-(isopropylthio)ethanamine, 2-(isopropylthio)ethanamine, 2-(methylamino)ethanethiol, N-methyl-2-(methylthio)ethanamine, 2-(ethylthio)-N-methylethanamine, 2-(isopropylthio)-N-methylethanamine, 2-(isopropylthio)-N-methylethanamine, 2-(ethylamino)ethanethiol, N-ethyl-2-(methylthio)ethanamine, N-ethyl-2-(ethylthio)ethanamine, N-ethyl-2-(isopropylthio)ethanamine, N-ethyl-2-(isopropylthio)ethanamine, 2-(diethylamino)ethanethiol, N,N-diethyl-2-(methylthio)ethanamine, N,N-diethyl-2-(ethylthio)ethanamine, N,N-diethyl-2-(isopropylthio)ethanamine, and N,N-diethyl-2-(isopropylthio)ethanamine,
- wherein the water-soluble polymer is represented by Formula 3:
- wherein k, m and n respectively represent an integer of 1 to 100, and wherein R1 is acetyl, and R2 is acetal.
Dependencies are inferred from the claim text.