Methods for removing an edge polymer from a substrate

A method for removing one or more polymer deposits from a substrate, the method comprising:

• providing a first grounded electrode disposed above an edge of said substrate;
• said first grounded electrode forming a first cavity;
• providing a first plasma configured to be generated in said first cavity, said first plasma configured to protrude from said first cavity to reach a first side of said substrate;
• providing a first powered electrode, wherein at least a portion of said first powered electrode is disposed in said first cavity;
• providing a first dielectric barrier in said first cavity and surrounding said portion of said first powered electrode;
• providing a first wire mesh disposed between said first dielectric barrier and said portion of said first powered electrode, said first wire mesh surrounding said portion of said first powered electrode, said first dielectric barrier surrounding said first wire mesh;
• providing a second dielectric barrier disposed between said first dielectric barrier and said portion of said first powered electrode, wherein said first wire mesh is sandwiched between said first dielectric barrier and said second dielectric barrier;
• and
• providing a first inert gas jet positioned above a location on a surface of said substrate, said location being away from said edge, said first gas jet configured to provide inert gas in a direction to push byproducts produced by said plasma away from said substrate in said direction;
• introducing at least one inert gas and at least one process gas into said first cavity;
• and
• applying an RF field to said first cavity using said powered electrode to generate said plasma from at least one inert gas and said at least one process gas.