Quartz window having gas feed and processing equipment incorporating same
AssigneeApplied Materials, Inc.
InventorsTae Jung Kim, Martin Ripley
Life of this patent
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Abstract
Methods and apparatus for providing a process gas to a substrate in a processing system are disclosed herein. In some embodiments, the substrate processing system may include a process chamber having a substrate support disposed therein; a light source disposed above the process chamber to direct energy towards the substrate support; and a window assembly disposed between the light source and the substrate support to allow light energy provided by the light source to enter the process chamber towards the substrate support, wherein the window assembly includes an inlet to receive a process gas and one or more outlets to distribute the process gas into the process chamber.
Claims20
A substrate processing system, comprising:
- a process chamber having a substrate support disposed therein;
- a light source disposed above the process chamber to direct energy towards the substrate support;
- and
- a window assembly disposed between the light source and the substrate support to allow light energy provided by the light source to enter the process chamber towards the substrate support, wherein the window assembly includes an inlet to receive a process gas, one or more outlets to distribute the process gas into the process chamber, an upper window, and a conduit disposed below the upper window and having the inlet disposed at a first end thereof to receive the process gas, wherein the conduit has one or more outlets to flow the process gas into the process chamber.
A method for providing a process gas to a substrate, comprising:
- providing a gas to an inlet of a window assembly disposed in a process chamber between a substrate support and a light source configured to direct energy towards the substrate support;
- flowing the gas through a conduit disposed beneath an upper window of the window assembly;
- and
- flowing the gas into the process chamber through one or more outlets disposed in the window assembly, wherein the one or more outlets are disposed in the conduit.
A substrate processing system, comprising:
- a process chamber having a substrate support disposed therein;
- a light source disposed above the process chamber to direct energy towards the substrate support;
- and
- a window assembly disposed between the light source and the substrate support to allow light energy provided by the light source to enter the process chamber towards the substrate support, wherein the window assembly includes an inlet to receive a process gas and one or more outlets asymmetrically arranged in a region opposite the substrate support to distribute the process gas into the process chamber.
A method for providing a process gas to a substrate, comprising:
- providing a gas to an inlet of a window assembly disposed in a process chamber between a substrate support and a light source configured to direct energy towards the substrate support;
- flowing the gas through the window assembly;
- flowing the gas into the process chamber through one or more asymmetrically arranged outlets disposed in the window assembly;
- and
- rotating the substrate support to provide uniform distribution of the process gas across a surface of a substrate disposed on the substrate support.
A substrate processing system, comprising:
- a process chamber having a substrate support disposed therein;
- a light source disposed above the process chamber to direct energy towards the substrate support;
- and
- a window assembly disposed between the light source and the substrate support to allow light energy provided by the light source to enter the process chamber towards the substrate support, wherein the window assembly includes an inlet to receive a process gas and one or more outlets to distribute the process gas into the process chamber, wherein the one or more outlets are either symmetrically or asymmetrically arranged in a region opposite the substrate support, and wherein at least one of the one or more outlets has at least one of a varying cross-section along an axis parallel to the direction of gas flow or a central axis that is non-perpendicular to a support surface of the substrate support.
Dependencies are inferred from the claim text.