Back to results
US 8,297,568 B2Granted
Sucking and holding device
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsAkihiko Nakamura, Junichi Katsuragawa
Life of this patent
Estimating the term…
Abstract
A sucking and holding device includes: a vacuum chuck for vacuum-sucking a substrate; and a suction assisting device for sandwiching the object between it and the vacuum chuck. The suction assisting device includes a substrate-facing surface. The substrate-facing surface seals a through hole provided in the substrate. With this configuration, the sucking and holding device can vacuum-suck and hold the substrate having a through hole. This leads to an accomplishment of a device which can hold various objects without positional displacement.
Claims2
A sucking and holding device comprising:
- vacuum suction and holding means for vacuum-sucking and holding an object to be sucked and held;
- suction assisting means for sandwiching the object between it and the vacuum suction and holding means,
- the object having a through hole,
- the suction assisting means sealing the through hole,
- the vacuum suction and holding means vacuuming the suction assisting means via the through hole;
- a sensor for detecting a position of the object to be sucked and held;
- and
- positional adjusting means for moving the vacuum suction and holding means, the positional adjusting means adjusting a horizontal position of the vacuum suction and holding means so that the object is adjusted to a predetermined horizontal position based on a horizontal position of the object detected by the sensor.
5 more elements
Dependencies are inferred from the claim text.