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US 8,297,196 B2Granted
Apparatus for transferring substrates
AssigneeLG Display Co., Ltd.
InventorsYeongjin Yeo, Seungheon Choi, Geejo Lee
Life of this patent
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Abstract
An apparatus for transferring substrates includes a carrier to which substrates are loaded, an upper transfer unit transferring the carrier horizontally by applying thrust to the carrier, a lower transfer unit maintaining the lower body of the carrier at the horizontal in a non-contact status, a magnetic levitation module levitating the carrier magnetically, and a lower damper unit maintaining the lower center of gravity of the carrier levitated by the magnetic levitation module.
Claims9
An apparatus for transferring substrates, comprising:
- a carrier to which substrates are loaded;
- an upper transfer unit transferring the carrier horizontally by applying thrust to the carrier;
- a lower transfer unit maintaining the lower body of the carrier at the horizontal in a non-contact status;
- a magnetic levitation module levitating the carrier magnetically;
- and
- an upper damper unit maintaining the upper center of gravity of the carrier levitated by the magnetic levitation module and including multiple dampers,
- wherein the multiple dampers are installed in such a way that the carrier and the magnetic levitation module respectively make contact with surfaces of the multiple dampers opposite to each other, and
- wherein the multiple dampers are a roller rotating around an axis having direction orthogonal to the direction along which the carrier is installed.
5 more elements
An apparatus for transferring substrates, comprising:
- a carrier to which substrates are loaded;
- an upper transfer unit transferring the carrier horizontally by applying thrust to the carrier;
- a lower transfer unit maintaining the lower body of the carrier at the horizontal in a non-contact status;
- a magnetic levitation module levitating the upper body of the carrier magnetically;
- a lower damper unit maintaining the lower center of gravity of the carrier levitated by the magnetic levitation module;
- and
- an upper damper unit maintaining the upper center of gravity of the carrier levitated by the magnetic levitation module and including multiple dampers,
- wherein the multiple dampers are installed in such a way that the carrier and the magnetic levitation module respectively make contact with surfaces of the multiple dampers opposite to each other, and
- wherein the multiple damper is a roller rotating around an axis having direction orthogonal to the direction along which the carrier is installed.
6 more elements
Dependencies are inferred from the claim text.