Devices and methods for reducing residual reticle chucking forces

A device for holding an object, comprising:

• a chuck comprising an object-mounting surface that contacts and holds a corresponding portion of the object, a deformable membrane coupled to at least a portion of the object-mounting surface such that a conformational change in the deformable membrane produces a corresponding change in the object-mounting surface, and a first cavity defined at least in part by the deformable membrane;
• and
• a pressure-changing device coupled to the first cavity to change pressure in the first cavity, relative to outside the first cavity, sufficiently to produce a conformational change of the deformable membrane and a corresponding change in the object-mounting surface sufficient to reduce a force with which the portion of the object is being held to the object-mounting surface,
• wherein the pressure-changing device comprises a vacuum device;
• and
• the vacuum device reduces pressure in the first cavity, relative to outside the first cavity, to deform the membrane away from the object and thereby reduce the force with which the portion of the object is being held to the object-mounting surface.

A device for holding an object, comprising:

• a chuck comprising an object-mounting surface that contacts and holds a corresponding portion of the object, a deformable membrane coupled to at least a portion of the object-mounting surface such that a conformational change in the deformable membrane produces a corresponding change in the object-mounting surface, and a first cavity defined at least in part by the deformable membrane;
• and
• a pressure-changing device coupled to the first cavity to change pressure in the first cavity, relative to outside the first cavity, sufficiently to produce a conformational change of the deformable membrane and a corresponding change in the object-mounting surface sufficient to reduce a force with which the portion of the object is being held to the object-mounting surface,
• wherein the chuck is a vacuum chuck;
• a chuck cavity is defined between the deformable membrane and the object-mounting surface;
• and
• the chuck cavity is connected to a vacuum device to reduce pressure in the chuck cavity relative to outside the chuck cavity, the reduced pressure holding the portion of the object to the object-mounting surface by vacuum-suction.

A device for holding an object, comprising:

• a chuck comprising an object-mounting surface that contacts and holds a corresponding portion of the object, a deformable membrane coupled to at least a portion of the object-mounting surface such that a conformational change in the deformable membrane produces a corresponding change in the object-mounting surface, and a first cavity defined at least in part by the deformable membrane;
• a pressure-changing device coupled to the first cavity to change pressure in the first cavity, relative to outside the first cavity, sufficiently to produce a conformational change of the deformable membrane and a corresponding change in the object-mounting surface sufficient to reduce a force with which the portion of the object is being held to the object-mounting surface, the pressure-changing device comprising a pressurizing device that increases pressure in the first cavity, relative to outside the first cavity, to deform the membrane toward the object and thereby reduce the force by which the portion of the object is being held to the object-mounting surface;
• a chuck cavity defined between the deformable membrane and the object-mounting surface;
• and
• multiple pins coupling the deformable membrane to the object-mounting surface, the pins extending from the deformable membrane into the chuck cavity and having respective top surfaces collectively defining at least a portion of the object-mounting surface.

A reticle stage, comprising:

• a base;
• a stage body movable in at least one direction relative to the base;
• a vacuum chuck coupled to the stage body, the vacuum chuck including a reticle-mounting surface that receives a corresponding region of a reticle;
• a cavity defined by walls and a deformable membrane, the deformable membrane being coupled to the reticle-mounting surface by multiple pins extending from the deformable membrane, the pins having respective top surfaces that collectively define the reticle-mounting surface;
• and
• a pressure-changing device connected to the cavity and being operable to change pressure in the cavity, relative to outside the cavity, sufficiently to deform the membrane and thus the reticle-mounting surface in a manner that reduces a force with which the reticle is being held to the reticle-mounting surface.

A method for holding a substantially planar object, comprising:

• placing a corresponding region of the object on an object-mounting surface collectively defined by top surfaces of multiple pins;
• coupling the object-mounting surface to a membrane via the pins;
• applying a first force to the region of the object, the first force having magnitude and direction to hold the corresponding region of the object to the object-mounting surface;
• preparing for removal of the object from the object-mounting surface by applying a second force to the membrane, the second force having magnitude and direction to deform the membrane and thus the object-mounting surface coupled thereto in a manner that reduces the first force;
• and
• removing the object from the object-mounting surface.

A method for holding a substantially planar object, comprising:

• placing a corresponding region of the object on an object-mounting surface;
• coupling the object-mounting surface to a membrane;
• applying a first force to the region of the object, the first force being produced by a first vacuum suction and having magnitude and direction to hold the corresponding region of the object to the object-mounting surface;
• preparing for removal of the object from the object-mounting surface by applying a second force to the membrane, the second force being produced by a second vacuum-suction that deforms the membrane, and hence at least a portion of the object-mounting surface, away from the object, the second vacuum-suction having magnitude and direction to deform the membrane and thus the object-mounting surface coupled thereto in a manner that reduces the first force;
• and
• removing the object from the object-mounting surface.

A method for holding a substantially planar object, comprising:

• placing a corresponding region of the object on an object-mounting surface;
• coupling the object-mounting surface to a membrane;
• applying a first force to the region of the object, the first force having magnitude and direction to hold the corresponding region of the object to the object-mounting surface;
• preparing for removal of the object from the object-mounting surface by applying a second force to the membrane, the second force having magnitude and direction to deform the membrane and thus the object-mounting surface coupled thereto in a manner that reduces the first force;
• and
• removing the object from the object-mounting surface;
• wherein the object-mounting surface is coupled to the membrane using multiple pins extending from the membrane;
• the pins have respective top surfaces that collectively define the object-mounting surface;
• and
• deformation of the membrane results in a corresponding movement of respective pins.