Illumination optical system and exposure apparatus

An illumination optical system configured to illuminate a surface to be illuminated, the illumination optical system comprising:

• a plurality of first reflection integrators configured to form a plurality of light sources by using light from a light source, the plurality of first reflection integrators having different divergent angles;
• a first selector configured to arrange one of the plurality of first reflection integrators on an optical path;
• a second reflection integrator having a plurality of cylindrical reflection surfaces that possess parallel meridional line directions, the second reflection integrator being configured to form a plurality of linear light sources by using light from the first reflection integrator;
• a pair of flat plane mirrors that are arranged parallel to the meridional line direction on the second reflection integrator and opposite to each other so as to sandwich the plurality of linear light sources in between;
• a plurality of aperture stops arranged at an exit side of the second reflection integrator in a direction perpendicular to the meridional line direction so that each aperture stop can have an optical Fourier transformation relationship with the surface to be illuminated, and the plurality of aperture stops having different aperture patterns;
• a second selector configured to arrange one of the plurality of aperture stops on the optical path;
• and
• an adjustment unit configured to adjust an interval between the pair of flat plane mirrors,
• wherein at least one of a selection by the first selector and an adjustment by the adjustment unit is performed in accordance with a selection by the second selector.

An exposure apparatus comprising:

• an illumination optical system configured to illuminate an original;
• and
• a projection optical system configured to project a pattern of the original onto a substrate,
• wherein the illumination optical system includes:
• a first reflection integrator configured to form a plurality of light sources by using light from a light source;
• a second reflection integrator having a plurality of cylindrical reflection surfaces that possess parallel meridional line directions, the second reflection integrator being configured to form a plurality of linear light sources by using light from the first reflection integrator;
• a pair of flat plane mirrors that are arranged parallel to the meridional line direction on the second reflection integrator and opposite to each other so as to sandwich the plurality of linear light sources in between;
• a unit for changing an aperture shape of an aperture stop arranged at an exit side of the second reflection integrator in a direction perpendicular to the meridional line direction so that the aperture stop has an optical Fourier transformation relationship with the surface to be illuminated;
• and
• an adjustment unit configured to adjust an interval between the pair of flat plane mirrors as the aperture shape of the aperture stop is changed.

A device manufacturing method comprising:

• exposing a substrate using an exposure apparatus that includes an illumination optical system configured to illuminate an original, and a projection optical system configured to project a pattern of the original onto the substrate;
• and
• developing the substrate that has been exposed,
• wherein the illumination optical system includes:
• a first reflection integrator configured to form a plurality of light sources by using light from a light source;
• a second reflection integrator having a plurality of cylindrical reflection surfaces that possess parallel meridional line directions, the second reflection integrator being configured to form a plurality of linear light sources by using light from the first reflection integrator;
• a pair of flat plane mirrors that are arranged parallel to the meridional line direction on the second reflection integrator and opposite to each other so as to sandwich the plurality of linear light sources in between;
• a unit for changing an aperture shape of an aperture stop arranged at an exit side of the second reflection integrator in a direction perpendicular to the meridional line direction so that the aperture stop has an optical Fourier transformation relationship with the surface to be illuminated;
• and
• an adjustment unit configured to adjust an interval between the pair of flat plane mirrors as the aperture shape of the aperture stop is changed.