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US 8,283,193 B2Granted
Integrated circuit system with sealring and method of manufacture thereof
AssigneeGlobalfoundries Singapore Pte. Ltd.
InventorsSoon Yoeng Tan, Teck Jung Tang
Life of this patent
Estimating the term…
Abstract
A method of manufacture an integrated circuit system includes: forming an insulation region in a base layer; filling an insulator in the insulation region around a perimeter of a main chip region; forming a contact directly on and within planar extents of the insulator; and forming an upper layer over the contact to protect the main chip region.
Claims20
A method of manufacture of an integrated circuit system comprising:
- forming an insulation region in a base layer;
- filling an insulator in the insulation region wherein the insulator is over an active portion and around a perimeter of a main chip region including an integrated circuit;
- forming a contact directly on and within planar extents of the insulator in the insulation region;
- and
- forming at least one sealring having an upper layer over active portion and the contact with the sealring surrounding and isolating an active surface area in the main chip region.
2 more elements
A method of manufacture of an integrated circuit system comprising:
- forming an insulation region and a first active portion in a base layer, the insulation region adjacent the first active portion;
- filling an insulator in the insulation region wherein the insulator is entirely around a perimeter of a main chip region including an integrated circuit;
- forming a contact directly on and within planar extents of the insulator in the insulation region;
- forming a layer one directly on the contact;
- forming an upper via over the layer one;
- forming at least one sealring having an upper layer directly on the upper via with the sealring surrounding and isolating an active surface area in the main chip region;
- and
- forming a passivation layer directly on the upper layer.
5 more elements
An integrated circuit system comprising:
- an insulation region in a base layer;
- an insulator in the insulation region wherein the insulator is over an active portion and around a perimeter of a main chip region including an integrated circuit;
- a contact directly on and within planar extents of the insulator in the insulation region;
- and
- at least one sealring having an upper layer over the contact with the sealring surrounding and isolating an active surface area in the main chip region.
2 more elements
Dependencies are inferred from the claim text.