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US 8,282,902 B2Granted
Apparatus for producing trichlorosilane, and method for producing trichlorosilane
AssigneeMitsubishi Materials Corporation
InventorMasayuki Tebakari
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AssigneeMitsubishi Materials Corporation
InventorMasayuki Tebakari
Estimating the term…
This apparatus for producing trichlorosilane, includes a reactor provided with gas inlets and gas outlets, a plurality of silicon seed rods held in the reactor, a heating apparatus that is provided in the reactor and heats the silicon seed rods, and a raw material gas supply system that is connected to the gas inlets and capable of selecting and supplying one of a first raw material gas for depositing polycrystalline silicon which contains trichlorosilane and hydrogen gas and a second raw material gas for producing trichlorosilane which contains silicon tetrachloride and hydrogen gas, wherein when the raw material gas supply system supplies the second raw material gas into the reactor, the silicon tetrachloride and hydrogen gas are reacted to produce a reaction product gas containing trichlorosilane.
A method for producing trichlorosilane comprising:
Dependencies are inferred from the claim text.
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From the US filing history. Foreign family members aren’t listed.
Characterised by the deposition of inorganic material, other than metallic material: deposition of silicon only
By decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material: by decomposition or…
Prepared by reacting chlorine with silicon or a silicon-containing material: with the preferential formation of trichlorosilane
Coating metallic material
About 4 years 1 month of term left · ends 10 Dec 2030 (estimated)
1. Field of the Invention
The present invention relates to an apparatus for producing trichlorosilane and a method for producing trichlorosilane which converts silicon tetrachloride into trichlorosilane.
This application claims priority on Japanese Patent Application No. 2008-139070, filed on May 28, 2008, the content of which is incorporated herein by reference.
FIG. 1 is a perspective view (a partially broken-out section view) showing an embodiment of an apparatus for producing trichlorosilane according to the present invention.
FIG. 2 is a longitudinal sectional view showing the apparatus for producing trichlorosilane of the present embodiment.
FIG. 3 is a longitudinal sectional view showing an apparatus for producing trichlorosilane in a state where trichlorosilane is produced after polycrystalline silicon is deposited on the silicon seed rods from the state shown in FIG. 2.
1: reactor, 2: bottom plate, 3: bell jar, 4: silicon seed rod, 5: electrode, 6: jet nozzles (gas inlets), 7: gas outlet, 8: raw material gas supply system, 9: external gas processing system, 10: power supply unit (heating apparatus), 12: connecting member, 13: seed assembly, 15: heater made of carbon (heating apparatus), 21: silicon tetrachloride supply system, 22: trichlorosilane supply system, 23: hydrogen gas supply system, 24 to 26: valve, 27: outer plate portion, 28: outer wall, 29: flow passage, 30: heat medium supply system, 31: heat-medium discharge system, 32: window, 33: infrared camera, R: silicon rod, S: adhering material.
One embodiment of an apparatus for producing trichlorosilane according to the present invention will be described below with reference to the drawings.
FIG. 1 is a view showing the whole apparatus for producing trichlorosilane of the present embodiment. A reactor 1 of the apparatus for producing trichlorosilane includes a bottom plate 2 which constitutes a reactor bottom, and a bell jar 3 which is detachably attached to the bottom plate 2 and is formed into a bell shaped. In this case, the upper surface of the bottom plate 2 is formed into a substantially flat horizontal plane; however, the bell jar 3 is bell-shaped as a whole, and the ceiling of the bell jar is dome-shaped. Therefore, the internal space of the reactor is formed such that the central portion thereof is the highest and the outer peripheral portion thereof is the lowest. In addition, both of the bottom plate 2 and the bell jar 3 are made of, for example, stainless steel.