Back to results
US 8,282,284 B2Granted
Methods and systems for micro bearings
AssigneeMicroZeus, LLC
InventorHarold L. Stalford
Life of this patent
Estimating the term…
Abstract
A micro drive assembly may comprise a substrate, a micro shall oriented in-plane with the substrate and at least one micro bearing to support rotation of the micro shaft. The micro shaft and micro bearing may be in or less than the micrometer domain.
Claims9
A method of assembling a micro drive comprising features 1-100 microns in size, the method comprising:
- fabricating a micro shaft on a substrate, fabricating the micro shaft on the substrate comprising:
- depositing one or more thin films, outwardly of the substrate;
- patterning the one or more thin films;
- etching the one or more thin films;
- fabricating a micro bearing on the substrate, fabricating the micro bearing on the micro shaft comprising:
- depositing one or more thin films, outwardly of the substrate;
- patterning the one or more thin films;
- etching the one or more thin films;
- moving the micro bearing post fabrication;
- and
- engaging a micro shaft with the micro bearing.
8 more elements
Dependencies are inferred from the claim text.