Flexibly deformable holding element for substrates
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsGerhard Kalkowski, Stefan Risse, Thomas Peschel, Christoph Damm
Life of this patent
Estimating the term…
Abstract
Flexibly deformable holding elements operate such that substrates can be held in a fixed manner at a surface of the holding element electrostatically or also by use of negative pressure and planar positional deviations or unwanted deformations can be compensated simply and reliably, where at least one cut-out having an opening arranged at the rear side is formed at the rear side of the holding element which is disposed opposite the surface, and an actuator is arranged there exerting compressive forces or pulling forces for a widening or narrowing of the cut-out and/or for a deformation of the holding element.
Claims11
An apparatus, comprising:
- a flexibly deformable holding element for holding substrates, the flexibly deformable holding element including front and rear spaced-apart and opposite surfaces,
- means for holding the substrate being located at the front surface of the flexibly deformable holding element, which holds the substrate one of electrostatically and by means of negative pressure,
- at least one cut-out disposed in the flexibly deformable holding element and having an opening arranged at the rear surface, and
- an actuator disposed in the at least one cut-out and operating to exert at least one of compressive forces and pulling forces for widening or narrowing of the cut-out, and for deforming the flexibly deformable holding element.
Dependencies are inferred from the claim text.