Nonvolatile semiconductor memory device and method for manufacturing same

A nonvolatile semiconductor memory device comprising:

• a semiconductor substrate;
• a multilayer structure provided on the semiconductor substrate and including a plurality of constituent multilayer bodies stacked on top of one another in a first direction perpendicular to a major surface of the semiconductor substrate, each of the plurality of constituent multilayer bodies including an electrode film provided parallel to the major surface, a first insulating film, a charge storage layer provided between the electrode film and the first insulating film, and a second insulating film provided between the charge storage layer and the electrode film;
• a first semiconductor pillar having a portion with a homogeneous width that penetrates through the multilayer structure in the first direction;
• a third insulating film provided between the first semiconductor pillar and the electrode film;
• a fourth insulating film provided between the first semiconductor pillar and the charge storage layer;
• a second semiconductor pillar neighboring the first semiconductor pillar in a second direction perpendicular to the first direction and penetrating through the multilayer structure in the first direction;
• a fifth insulating film provided between the second semiconductor pillar and the electrode film;
• a sixth insulating film provided between the second semiconductor pillar and the charge storage layer;
• a first connecting portion electrically connecting between the first semiconductor pillar and the second semiconductor pillar on the semiconductor substrate side;
• a bit line extending in the second direction and connected to a first end portion of the first semiconductor pillar located on a opposite side from the semiconductor substrate;
• and a source line extending in a third direction orthogonal to the first direction and the second direction and connected to a second end portion of the second semiconductor pillar located on the opposite side from the semiconductor substrate.