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US 8,263,306 B2Granted
Use of blended solvents in defectivity prevention
AssigneeTexas Instruments Incorporated
InventorsMark H. Somervell, Benjamen M. Rathsack, David C. Hall
Life of this patent
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Abstract
The present invention provides a blended solvent for solubilizing an ultraviolet photoresist. The blended solvent comprises a mixture of from about 5 vol % to about 95 vol % of a first solvent, wherein the first solvent comprises a cyclic ester. A balance of the mixture comprises a second solvent, wherein the second solvent comprises a volatile organic liquid.
Claims5
A blended solvent for solubilizing an ultraviolet photoresist, comprising:
- a mixture of from about 5 vol % to about 95 vol % of a first solvent, wherein said first solvent is a cyclic ester selected from the group consisting of α-acetolactone, β-propiolactone, and ∈-caprolactone;
- and
- a balance of said mixture consisting essentially of a second solvent, wherein said second solvent is a volatile organic liquid and wherein said second solvent comprises propylene glycol monomethylether acetate.
Dependencies are inferred from the claim text.