Photoimageable branched polymer
AssigneeBrewer Science Inc.
InventorsHao Xu, Ramil-Marcelo L. Mercado, Douglas J. Guerrero, Jim D. Meador
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Abstract
Novel, developer-soluble anti-reflective coating compositions and methods of using those compositions are provided. The compositions comprise a multi-functional acid reacted with a multi-functional vinyl ether to form a branched polymer or oligomer. In use, the compositions are applied to a substrate and thermally crosslinked. Upon exposure to light and post-exposure baking, the cured polymers/oligomers will decrosslink and depolymerize, rendering the layer soluble in typical photoresist developing solutions (e.g., alkaline developers).
Claims16
A method of forming a microelectronic structure, said method comprising:
- providing a substrate having a surface;
- applying a composition to said surface, said composition including a compound comprising a branched polymer, branched oligomer, or a mixture thereof, said compound having a first molecular weight;
- crosslinking the compound in said composition;
- applying a photoresist layer to said composition;
- and
- exposing said composition to light and baking said composition so as to decrosslink said compound and to break said compound into moieties, at least about 80% of those moieties having respective molecular weights that are less than said first molecular weight.
Dependencies are inferred from the claim text.