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US 8,148,900 B1Granted
Methods and systems for providing illumination of a specimen for inspection
AssigneeKLA-Tencor Technologies Corporation
InventorsGreg Kirk, Rich Solarz
Life of this patent
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AssigneeKLA-Tencor Technologies Corporation
InventorsGreg Kirk, Rich Solarz
Estimating the term…
Methods and systems for providing illumination of a specimen for inspection are provided. One embodiment relates to a system configured to provide illumination of a specimen for inspection. The system includes an electrodeless lamp configured to generate light. The system is further configured such that the light illuminates the specimen during the inspection. Another embodiment relates to a system configured to inspect a specimen. The system includes an electrodeless lamp configured to generate light and one or more optical elements configured to direct the light to the specimen. The system also includes a detection subsystem configured to generate output responsive to light from the specimen. The output can be used to detect defects on the specimen. An additional embodiment relates to a method for providing illumination of a specimen for inspection. The method includes illuminating the specimen during the inspection with light generated by an electrodeless lamp.
A system configured to provide illumination of a specimen for inspection, comprising an electrodeless lamp configured to generate light, wherein the system is further configured such that the light illuminates the specimen during the inspection, wherein the electrodeless lamp comprises a bulb configured to optimize a shape of a plasma within the bulb to a collector of a system configured to inspect the specimen, and wherein the electrodeless lamp is substantially flat on one side and has a substantially hemispherical shape.
A system configured to inspect a specimen, comprising:
A method for providing illumination of a specimen for inspection, comprising illuminating the specimen during the inspection with light generated by an electrodeless lamp, wherein the electrodeless lamp comprises a bulb configured to optimize a shape of a plasma within the bulb to a collector of a system configured to inspect the specimen, and wherein the electrodeless lamp is substantially flat on one side and has a substantially hemispherical shape.
Dependencies are inferred from the claim text.