Microengineered vacuum interface for an ionization system
AssigneeMicrosaic Systems Limited
InventorsRichard Syms, Richard William Moseley
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Abstract
A planar component for interfacing an atmospheric pressure ionizer to a vacuum system is described. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.
Claims19
A disposable microengineered interface component for coupling between a separate atmospheric pressure ionization source and a separate vacuum system, the interface component providing for a transmission of an ion beam generated by the ionization source to the vacuum system, the interface being formed from a material having an orifice defined therein so as to provide a channel in the material through which the ion beam may be received into and through the interface component prior to being presented to the vacuum system.
A method of fabricating an ionization interface for coupling between a separate atmospheric pressure ionization source and a separate vacuum system, the method comprising the microengineering steps of:
- a) providing a substrate material:
- b) removing a portion of the material to define an orifice in the substrate, the orifice extending from a first side of the substrate to a second side of the substrate so as to provide a channel through the substrate through which an ion beam may operably pass from the atmospheric ionization source to the vacuum system.
A method of fabricating an ionization interface for coupling between a separate atmospheric pressure ionization source and a separate vacuum system, the method comprising the microengineering steps of forming a conduit in a material, the conduit defining a passage for an ion beam generated in the atmospheric pressure ionization source to the vacuum system.
Dependencies are inferred from the claim text.