US 8,148,227 B2 · Method for providing a self-aligned conductive structure

Abstract

An embodiment according to the present invention comprises a method for providing a self-aligned conductive structure comprising providing a first structure on a surface, wherein the first structure comprises a first and a second layer, and providing an intermediate structure on the surface, wherein the intermediate structure at least partially abuts the first structure laterally at a first lateral edge of the first structure. The method further comprises removing at least a part of the second layer, the part being adjacent to the first lateral edge, and providing the conductive structure such that the conductive structure replaces at least the removed part of the second layer and abuts the first lateral edge.

Claims25

Dependent claims

A method for providing a self-aligned conductive structure forming at least a part of a gate electrode structure of a field effect transistor, comprising:

providing a first structure on a surface of an insulating layer, facing away from a substrate on which the insulating layer is arranged, the first structure comprising a first layer and a second layer, the first layer comprising electrically conductive material and being arranged between the second layer and the insulating layer;
providing an intermediate structure on the surface of the insulating layer, the intermediate structure at least partially laterally abutting the first structure at a first lateral edge of the first structure;
removing at least a part of the second layer, the removed part being adjacent to the first lateral edge;
and
providing the conductive structure such that the conductive structure replaces at least the removed part of the second layer and abuts the first lateral edge and forms, along with the first layer, the gate electrode structure.

2 more elements

A method for providing a conductive structure, comprising:

providing a structured sacrificial layer on a surface;
using the structured sacrificial layer as a mask;
providing, on the surface, an intermediate structure at least partially abutting a first lateral edge of the structured sacrificial layer;
removing at least a part of the structured sacrificial layer adjacent to the first lateral edge of the structured sacrificial layer;
and
providing the conductive structure such that the conductive structure replaces at least the removed part of the structured sacrificial layer and abuts the first lateral edge,
wherein removing comprises generating an opening in at least the intermediate structure such that the opening is in immediate contact with the first lateral edge of the structured sacrificial layer or a second lateral edge of the structured sacrificial layer, the second lateral edge being opposite to the first lateral edge, or comprises the first lateral edge or the second lateral edge, wherein a depth of the opening is smaller than a height of the intermediate structure and a height of the structured sacrificial layer, and wherein providing the conductive structure comprises providing the conductive structure to the opening.

4 more elements

Dependencies are inferred from the claim text.

Method for providing a self-aligned conductive structure

Life of this patent

Method for providing a self-aligned conductive structure

Life of this patent

Abstract

Claims25