Apparatus for manufacturing magnetic recording disk, and in-line type substrate processing apparatus

A method for manufacturing a magnetic recording disk comprising:

• circulating a first substrate holder along a first polygonal circulation path on which a first group of vacuum chambers is provided, the first group of vacuum chambers including a load-lock chamber and a magnetic film deposition chamber;
• circulating a second substrate holder along a second polygonal circulation path on which a second group of vacuum chambers is provided, the second group of vacuum chambers including an unload-lock chamber and a burnishing-and-lubricant-layer-preparation chamber;
• loading a substrate on the first substrate holder in the load-lock chamber;
• depositing a magnetic film onto the substrate on the first substrate holder in the magnetic film deposition chamber;
• picking up the substrate from the first substrate holder on the first polygonal circulation path after the magnetic film is deposited onto the substrate;
• transferring the substrate along a connection transfer path interconnecting the first and second polygonal circulation paths in vacuum;
• placing the substrate on the second substrate holder on the second polygonal circulation path;
• carrying out a simultaneous burnishing and lubricant-layer-preparation step onto the substrate on the second substrate holder in the burnishing-and-lubricant-layer-preparation chamber;
• and
• unloading the substrate from the second substrate holder in the unload-lock chamber after the simultaneous burnishing and lubricant-layer-preparation step, wherein
• the connection transfer path interconnects a side of the first polygonal circulation path and a side of the second polygonal circulation path that face each other,
• the substrate is transferred along the connection transfer path by one robot comprising an arm capable of picking up the substrate from the first substrate holder at the side of the first polygonal circulation path and placing the substrate on the second substrate holder at the side of the second polygonal circulation path, and
• in the simultaneous burnishing and lubricant-layer-preparation step, a lubricant poured on a burnishing tape is extended on the substrate as the burnishing tape is rubbed with the substrate.