Method of manufacturing gas sensor
AssigneeSamsung Electronics Co., Ltd.
InventorsSung-ouk Jung, Myung-sup Jung, Soo-suk Lee
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Abstract
Provided herein is a method of manufacturing a gas sensor. The method includes forming electrodes on a surface of a substrate, manufacturing a paste having a complex of CNTs and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases, coating the paste on the substrate to cover the electrodes, patterning the paste by a photolithography process, and reducing the metal-ligand complex included in the patterned paste.
Claims13
A method of manufacturing a gas sensor, comprising:
- forming electrodes on a surface of a substrate;
- wherein the electrodes comprise first and second electrodes formed in an inter-digitated shape;
- manufacturing a paste comprising CNTs having functional groups that can generate cross-linking by exposure to light and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases;
- wherein the CNTs are manufactured by modifying carboxylic acid groups present on surfaces of the CNTs with (meth)acrylate groups;
- coating the paste on the surface of the substrate to cover the electrodes;
- patterning the paste by a photolithography process;
- and
- reducing the metal-ligand complex included in the patterned paste.
A method of manufacturing a gas sensor, comprising:
- forming electrodes on a surface of a substrate;
- wherein the electrodes comprise first and second electrodes formed in an inter-digitated shape;
- manufacturing a paste consisting essentially of
- modified CNTs comprising radical cross-linking functional groups, a photo-initiator, and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases, or
- CNTs comprising carboxylic acid functional groups, a photoresist, and a metal-ligand complex comprising a metal that has adsorption selectivity with respect to specific gases;
- wherein the CNTs are manufactured by modifying carboxylic acid groups present on surfaces of the CNTs with (meth) acrylate groups;
- coating the paste on the surface of the substrate to cover the electrodes;
- patterning the paste by a photolithography process;
- and
- reducing the metal-ligand complex included in the patterned paste.
A method of manufacturing a gas sensor, comprising:
- forming electrodes on a surface of a substrate;
- wherein the electrodes comprise first and second electrodes formed in an inter-digitated shape;
- manufacturing a paste consisting essentially of CNTs, a photoresist, and a metal-ligand complex comprising a metal that has gas adsorption selectivity for specific gases;
- wherein the CNTs are manufactured by modifying carboxylic acid groups present on surfaces of the CNTs with (meth)acrylate groups;
- coating the paste on the surface of the substrate to cover the electrodes;
- patterning the paste by a photolithography process;
- and
- reducing the metal-ligand complex included in the patterned paste.
Dependencies are inferred from the claim text.