Method for the production of silicon from silyl halides
AssigneeSpawnt Private S.à.r.l.
InventorNorbert Auner
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Abstract
The present invention relates to a method for the production of silicon from silyl halides. In a first step, the silyl halide is converted, with the generation of a plasma discharge, to a halogenated polysilane, which is subsequently decomposed to silicon, in a second step, with heating.
Claims19
Method for the production of silicon from silyl halides, wherein in a first step, a gas comprising a silyl halide in the gaseous state is led into a reactor and the silyl halide in the gaseous state is converted, with the generation of a plasma discharge, to a halogenated polysilane, which is subsequently decomposed to silicon, in a second step, with heating.
Dependencies are inferred from the claim text.