Organic EL element and a method for manufacturing the organic EL element
AssigneeUlvac, Inc.
InventorToshio Negishi
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AssigneeUlvac, Inc.
InventorToshio Negishi
Estimating the term…
A dense cathode electrode layer having a step coverage is to be formed on an electron injection layer. The electron injection layer in which fine particles of an electron injection material is dispersed in an organic thin film having an electron transport property is formed by vapor co-depositing the electron transport material and the electron injection material; and a cathode electrode layer made of an alloy layer of MgAg is formed by a sputtering method. Since lower portions of the fine particles of the electron injection material dispersed in the surface of the organic thin film are buried in the organic thin film, the electron injection particles are not peeled off even if sputtering particles collide with the electron injection particles, and the upper portions are in contact with the cathode electrode layer formed by sputtering particles.
An organic EL element-manufacturing method for manufacturing an organic EL element which includes an anode electrode layer, a hole injection layer arranged on the anode electrode layer, a light-emitting layer arranged on the hole injection layer, an electron transport layer arranged on the light-emitting layer, an electron injection layer arranged on the electron transport layer, and a cathode electrode layer arranged on the electron injection layer, wherein when a voltage is applied between the anode electrode layer and the cathode electrode layer and holes and electrons are injected into the light-emitting layer from the hole injection layer and the electron injection layer, the light-emitting layer emits light and a luminescent light is emitted outside, the organic EL element-manufacturing method, comprising:
Dependencies are inferred from the claim text.