Purge system for a substrate container

A combination purgible substrate container and purging station, the purging station having a substrate container receiving zone with an upwardly extending purge nozzle, the nozzle having a circular engagement lip with a diameter and positioned in a horizontal plane, the container comprising a nozzle interface with a cantilevered flange portion and a central aperture therein, the cantilevered flange portion extending horizontally and connecting with a supported portion radially inward from the cantilevered flange portion, the supported portion having a diameter less than that of the circular engagement lip, whereby when the substrate container is placed in the receiving zone with the nozzle interface aligned with the purge nozzle, the cantilevered flange portion flexes upwardly from the horizontal.

A substrate container comprising containment wall with a purging aperture, a nozzle interface, the nozzle interface comprising a resilient polymeric sealing cantilevered flange portion positioned parallel to the containment wall and outwardly facing, a purge gas passageway extending axially through the sealing cantilevered flange portion into the interior of the substrate container, the cantilevered portion having an unflexed position wherein the cantilevered peripheral portion extends horizontally and radially outward and a sealing engagement position wherein the cantilevered portion is flexed and extends upwardly at an angle from the horizontal unflexed position.

A method of purging a substrate container, the substrate container having a purging port on a bottom side thereof, the purging port comprising a resilient polymeric thin annular portion, the annular portion having a downwardly facing engagement surface portion and an opposite upwardly facing side, the upwardly facing side not being supported, the method comprising the steps of:

• placing the substrate container on purging station having an upwardly directed nozzle with the downwardly facing engagement surface,
• bending the annular portion upwardly by the weight of the substrate container resting on the nozzle.

A substrate container with a purge port aperture and a purge port assembly attached therein, said purge port assembly comprising a body portion and a nozzle receiving portion both formed of a resilient polymer, said body portion having an annular channel shaped recess extending therearound and sized to sealingly fit the purge port aperture, said body portion further having a diffuser port and a bore extending axially through the body and in communication with the diffuser port, the nozzle receiving portion comprising a flange portion integral with a tubular portion, the flange portion having a central aperture and comprising a supported flange portion and a cantilevered flange portion concentric with and extending radially away from the supported flange portion, and a tubular portion integral with the supported flange portion, the tubular portion sized to be insertably retained within the bore of the body portion, whereby the flange portion is positioned exteriorly of the container, the diffuser port is interiorly positioned and there is an axial purge path through the purge port assembly.

A method of confirming placement of a substrate container on a purge station on a purge nozzles, comprising applying downward pressure and visually observing and feeling a deflection of at least about 0.1 inch to confirm the proper engagement, the deflection arising from an upward deflection of a cantilevered peripheral portion of a cantilevered flange portion.

A reticle pod stocker in combination with a plurality of reticle pods, the stocker comprising:

• a vertical post having purge gas tubing therein and connectible to a purge gas source,
• a plurality of trays swivelably connected to the vertical post, whereby each of the trays swing horizontally to a plurality of different positions, each tray configured for receiving reticle pods and having a purge nozzle extending upwardly therefrom, each purge nozzle connecting to the purge gas tubing. The plurality of reticle pods each having a downwardly directed cantilevered purge interface flange, the flange having a supported portion and a cantilevered portion, the reticle pods positioned on trays of the pod stocker with the cantilevered portions engaged with the upwardly extending nozzles whereby the cantilevered portions are flexed upwardly from a horizontal position.