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US 8,146,439 B2Granted
Sensor system and method for manufacturing a sensor system
AssigneeRobert Bosch GmbH
InventorsMarcus Ahles, Hubert Benzel
Life of this patent
Estimating the term…
Abstract
A sensor system, in particular a pressure sensor system, having a substrate having a main extension plane, the substrate having at least one trench on a first side, and the trench being provided to produce a diaphragm area on a second side of the substrate diametrically opposite to the first side perpendicularly to the main extension plane, and a decoupling element further being integrated in the material of the diaphragm area.
Claims11
A sensor system comprising:
- a substrate having a main extension plane, the substrate having at least one trench on a first side, which is provided to produce a diaphragm area on a second side of the substrate, which is diametrically opposite to the first side perpendicularly to the main extension plane;
- and
- a decoupling element is integrated in a material of the diaphragm area.
A method for manufacturing a sensor system, comprising:
- providing a substrate in a first manufacturing step;
- manufacturing a decoupling element in a second manufacturing step;
- and
- manufacturing a trench in a third manufacturing step.
1 more element
Dependencies are inferred from the claim text.