Method and system for creating self-aligned twin wells with co-planar surfaces in a semiconductor device
AssigneeAtmel Corporation
InventorsGayle W. Miller, Jr., Bryan D. Sendelweck
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AssigneeAtmel Corporation
InventorsGayle W. Miller, Jr., Bryan D. Sendelweck
Estimating the term…
A method and system for providing a twin well in a semiconductor device is described. The method and system include providing at least one interference layer and providing a first mask that covers a first portion of the semiconductor device and uncovers a second portion of the semiconductor device. The first and second portions of the semiconductor device are adjacent. The method and system also include implanting a first well in the second portion of the semiconductor device after the first mask is provided. The method and system also include providing a second mask. The interference layer(s) are configured such that energy during a blanket exposure develops the second mask that uncovers the first portion and covers the second portion of the semiconductor device. The method and system also include implanting a second well in the first portion of the semiconductor device after the second mask is provided.
A semiconductor device comprising:
A semiconductor device comprising:
A semiconductor device comprising:
Dependencies are inferred from the claim text.