Manufacturing method of structure by imprint
AssigneeCanon Kabushiki Kaisha
InventorsAtsunori Terasaki, Shingo Okushima, Junichi Seki
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Abstract
A manufacturing method of a structure by an imprint process includes a first imprint step of forming a first resin material layer by applying a first resin material onto a substrate and then transferring an imprint pattern of a mold onto the first resin material layer, a second imprint step of forming a second resin material layer by applying a second resin material onto the first resin material layer formed in the first imprint step and onto an area of the substrate adjacent to the first resin material layer and then transferring the imprint pattern of the mold onto the second resin material layer, and a step of forming a pattern by etching the first and second resin material layers.
Claims20
A manufacturing method of a structure by imprint, comprising:
- a first imprint step of forming a first resin material layer by applying a first resin material onto a substrate and then transferring an imprint pattern of a mold onto the first resin material layer;
- a second imprint step of forming a second resin material layer by applying a second resin material onto the first resin material layer formed in said first imprint step and onto an area of the substrate adjacent to the first resin material layer and then transferring the imprint pattern of the mold onto the second resin material layer;
- and
- a step of forming a pattern by etching the first and second resin material layers,
- wherein in said second imprint step, the imprint pattern of the mold is transferred onto the second resin material layer so that a part of a projection of the imprint pattern transferred onto the first resin material layer and a part of a projection of the imprint pattern transferred onto the second resin material layer overlap with each other.
Dependencies are inferred from the claim text.