Temperature controlled showerhead
AssigneeNovellus Systems, Inc.
InventorsHenner Meinhold, Dan M. Doble, Stephen Lau, Vince Wilson, Easwar Srinivasan
Life of this patent
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Abstract
A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.
Claims27
A chandelier-type showerhead comprising:
- (a) a stem comprising a convective cooling fluid passageway, a gas delivery passageway, a first end, and a second end opposite the first end, wherein:
- the ratio of the stem's length to the stem's width is at least 2:1,
- the first end is configured for attachment to a chamber,
- the convective cooling fluid passageway enters and exits the stem at the first end, and
- the gas delivery passageway enters the stem at the first end and exits the stem at the second end;
- (b) a back plate thermally coupled to the stem at the second end, wherein:
- the stem protrudes from the back plate, and
- the first end is offset from the back plate by a distance substantially corresponding to the length of the stem;
- (c) a heater physically attached to the back plate;
- (d) a face plate thermally coupled to the back plate;
- and
- (e) a temperature sensor for measuring a temperature of the face plate, wherein the temperature sensor is electrically connected to a cable routed from the first end to the second end, and wherein the cable is routed within a sheath between the first end and the second end.
A temperature control system for controlling showerhead temperatures in a CVD chamber, the system comprising:
- (a) a CVD chamber comprising one or more chandelier-type temperature-controlled showerheads, each showerhead comprising:
- i. a stem comprising a convective cooling fluid passageway, a gas delivery passageway, a first end, and a second end opposite the first end, wherein:
- the ratio of the stem's length to the stem's width is at least 2:1,
- the first end is configured for attachment to the CVD chamber,
- the convective cooling fluid passageway enters and exits the stem at the first end, and
- the gas delivery passageway enters the stem at the first end and exits the stem at the second end,
- ii. a back plate thermally coupled to the stem at the second end, wherein:
- the stem protrudes from the back plate, and
- the first end is offset from the back plate by a distance substantially corresponding to the length of the stem,
- iii. a heater thermally coupled to the back plate,
- iv. a face plate thermally coupled to the back plate, and
- v. a temperature sensor for measuring the temperature of the face plate, wherein the temperature sensor is electrically connected to a cable routed from the first end to the second end, and wherein the cable is routed within a sheath between the first end and the second end;
- (b) a cooling system fluidly coupled to the convective cooling fluid passageways of the one or more chandelier-type temperature-controlled showerheads comprising:
- i. inlets and outlets connected with the convective cooling fluid passageways,
- ii. a liquid-cooled heat exchanger configured to remove heat from a convective cooling fluid that flows serially through the convective cooling fluid passageways of the one more temperature-controlled showerheads and is cooled by the liquid-cooled heat exchanger during transit between each chandelier-type temperature-controlled showerhead;
- and
- (c) a controller coupled to each temperature sensor and heater.
Dependencies are inferred from the claim text.