Electrostatic chuck with heater and manufacturing method thereof

A manufacturing method of an electrostatic chuck with a heater, the electrostatic chuck comprising a base formed of a sintered body containing alumina, an electrostatic chuck electrode embedded in the base, and a resistance heating body embedded in the base, the method comprising the steps of:

• forming a dielectric layer by shaping an alumina granulated powder obtained by preliminarily firing a raw material powder of alumina and a granulated powder comprising a binder in air at 500° C. or more, the dielectric layer having a carbon content of 0.01 wt % or less;
• forming the electrostatic chuck electrode on a surface of the dielectric layer;
• fabricating an alumina compacted body by stacking raw material which forms a support member supporting the dielectric layer on the surface of the dielectric layer with the electrostatic chuck electrode formed thereon;
• and
• firing the alumina compacted body,
• wherein the step of fabricating an alumina compacted body includes a step of arranging an alumina granulated powder that is not subjected to preliminary firing after arranging the alumina granulated powder subjected to preliminary firing in advance, on the surface of the dielectric layer where the electrostatic chuck electrode is formed, and
• wherein the alumina granulated powder that is not subjected to the preliminary firing is arranged on a side apart from the electrostatic chuck electrode more than the alumina granulated powder subjected to preliminary firing in advance.