Cantilevered probes having piezoelectric layer, treated section, and resistive heater, and method of use for chemical detection

A chemical sensor system comprising:

• a first cantilevered probe comprising:
• a piezoelectric layer;
• a treated section selected to react with a chemical species;
• a resistive heater thermally couplable to the treated section;
• and
• first and second electrodes electrically coupled to the piezoelectric layer;
• a driver circuit electrically coupled to the first and second electrodes and configured to actuate the cantilevered probe;
• a sensing circuit electrically coupled to the first and second electrodes and configured to sense oscillation of the cantilevered probe;
• a heater circuit electrically coupled to the resistive heater;
• and
• a plurality of additional cantilevered probes arranged in an array together with the first cantilevered probe, each of the plurality of additional cantilevered probes comprising:
• a piezoelectric layer;
• and
• first and second electrodes electrically coupled to the piezoelectric layer;
• wherein the first cantilevered probe is actuated when, through the first and second electrodes, a drive voltage is applied to the piezoelectric layer by the driver circuit, the actuated cantilevered probe generating a displacement signal transmitted to the sensing circuit, and wherein the piezoelectric layers of each of the cantilevered probes of the array are connected in series.