Compact abbe's kernel generation using principal component analysis

A computer-readable storage device storing instructions that when executed by a computer cause the computer to perform a method for determining a set of kernels which model an optical system of a photolithography process, the method comprising:

• receiving optical parameters for the photolithography process's optical system;
• determining a point spread function for an Abbe's source based on the optical parameters;
• determining a correlation matrix from the point spread function;
• performing, based on principal component analysis, an eigen decomposition of the correlation matrix to obtain the set of kernels;
• and
• storing the set of kernels.

An apparatus for determining a set of kernels which model an optical system of a photolithography process, the apparatus comprising:

• a receiving mechanism configured to receive optical parameters for the photolithography process's optical system;
• a first determining mechanism configured to determine a point spread function for an Abbe's source based on the optical parameters;
• a second determining mechanism configured to determine a correlation matrix from the point spread function;
• a performing mechanism configured to perform, based on principal component analysis, an eigen decomposition of the correlation matrix to obtain the set of kernels;
• and
• a storing mechanism configured to store the set of kernels.