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AssigneeCarl Zeiss SMT GmbH
InventorsWolfgang Emer, Helmut Haidner, Ulrich Wegmann
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A method and apparatus for spatially resolved wavefront measurement on a test specimen, a method and apparatus for spatially resolved scattered light determination, a diffraction structure support and a coherent structure support therefor, and also an objective or other radiation exposure device manufactured using such a method, and an associated manufacturing method. An embodiment involves carrying out, for the wavefront measurement, a first shearing measuring operation, which includes a plurality of individual measurements with at least two first shearing directions and spatially resolved detection of shearing interferograms generated, and an analogous second shearing measuring operation with at least one second shearing direction, the at least one second shearing direction being non-parallel to at least one first shearing direction. From the shearing interferograms detected, it is possible e.g. to determine a wavefront spatial frequency spectrum and/or a point response of the test specimen and to carry out a spatially resolved scattered light determination with a point spread function. The embodiment may be used, e.g., for spatially resolved scattered light determination of projection objectives for microlithography.
A method for spatially resolved wavefront measurement on a test specimen, comprising:
A method for spatially resolved scattered light measurement on a test specimen, comprising:
A diffraction structure support having a plurality of diffraction structures which are arranged in partial regions of the diffraction structure support that are spaced apart by a predetermined, non-zero distance from one another, and each of which has at least one period length and at least one periodicity direction, wherein the periodicity directions of at least two of the diffraction structures are non-parallel to one another.
A coherence structure support having a plurality of coherence structures which are arranged in partial regions of the coherence structure support that are spaced apart by a predetermined, non-zero distance from one another, and each of which has at least one period length and at least one periodicity direction, wherein the periodicity directions of at least two of the coherence structures are non-parallel to one another.
Dependencies are inferred from the claim text.