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US 8,134,276 B2Granted
Methods and systems for positioning micro elements
AssigneeMicroZeus, LLC
InventorHarold L. Stalford
Life of this patent
Estimating the term…
Abstract
A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro structure in response to the input.
Claims22
A micro device, comprising:
- a substrate;
- a first micro structure fabricated on the substrate;
- a second micro structure fabricated on the substrate;
- a port configured to receive an input;
- the first micro structure coupled to the substrate and configured to move from a first in-plane position comprising an upper surface of the first micro structure parallel to the substrate to a second out-of-plane position comprising the upper surface of the first microstructure not parallel to the substrate and into assembly with the second micro structure coupled to the substrate to support relative movement between the first micro structure and the second micro structure in response to the input;
- the first micro structure and the second micro structure each sized from a micrometer to a millimeter;
- a micro chip having the substrate;
- and
- an on-chip actuator operable to move the first micro structure from the first position where the first micro structure is not engaged with the second micro structure to the second position where the first micro structure is engaged with the second micro structure in response to the input.
6 more elements
A micro device comprising:
- a substrate;
- a first micro structure coupled to the substrate;
- a second micro structure coupled to the substrate;
- a port configured to receive an input;
- and
- the first micro structure configured to move from a first non-engaged position where the first micro structure is not engaged with the second micro structure to a second engaged position where the first micro structure is engaged with the second micro structure in response to the input;
- and
- wherein the first micro structure comprises a bearing and the second micro structure comprises a rotational shaft and wherein the bearing in the second position is intermediate ends of the rotational shaft to support rotation of the rotational shaft.
5 more elements
A micro device, comprising:
- a micro chip having a substrate;
- a first micro structure coupled to the substrate of the micro chip;
- a second micro structure coupled to the substrate of the micro chip;
- the first micro structure and the second micro structure configured in response to on-chip actuation to move from a first position to a second position into engagement with each other to form an assembled system on the micro chip, wherein the first and second micro structures are not operationally associated with each other in the first position and are operationally associated with each other in the assembled system;
- and
- the first micro structure comprising a micro bearing and the second micro structure comprising a micro shaft.
3 more elements
A micro device comprising:
- a substrate;
- a first micro structure coupled to the substrate;
- a second micro structure coupled to the substrate;
- a port configured to receive an input;
- and
- the first micro structure configured to move from a first position to a second position comprising an upper surface of the first micro structure not parallel to the substrate into engagement with the second micro structure in response to the input;
- a stationary alignment system configured to guide movement of the first micro structure into engagement with the second micro structure;
- and
- locks operable to lock the first micro structure into place to prevent return from the second position to the first position after engagement with the second micro structure.
6 more elements
A micro device comprising:
- a substrate;
- a first micro structure coupled to the substrate;
- a second micro structure coupled to the substrate;
- a port configured to receive an input;
- and
- the first micro structure configured to move into engagement with the second micro structure in response to the input;
- and
- wherein the first micro structure comprises a bearing and the second micro structure comprises a rotational shaft and wherein the bearing is configured to contain the rotational shaft to support rotation of the rotational shaft;
- and
- wherein the bearing surrounds the rotational shaft.
7 more elements
Dependencies are inferred from the claim text.