MEMS diaphragm
AssigneeUnited Microelectronics Corp.
InventorsHui-Shen Shih, Yu-Fang Chien
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Abstract
A microelectromechanical system (MEMS) diaphragm is provided. The MEMS diaphragm includes a first conductive layer, a second conductive layer and a dielectric layer. The first conductive layer is disposed on a substrate and having a plurality of openings. The dimenisons of the openings are gradually reduced toward the edge of the first conductive layer. The second conductive layer is disposed between the first conductive layer and the substrate. The dielectric layer is partially disposed between the first conductive layer and the second conductive layer, so that a portion of the first conductive layer is suspended.
Claims7
A microelectromechanical system (MEMS) diaphragm, comprising:
- a first conductive layer, disposed on a substrate and having a plurality of openings, wherein dimensions of the openings are gradually reduced toward an edge of the first conductive layer;
- a second conductive layer, disposed between the first conductive layer and the substrate;
- and
- a first dielectric layer, partially disposed between the first conductive layer and the second conductive layer, so that a portion of the first conductive layer is suspended.
Dependencies are inferred from the claim text.