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US 8,133,640 B2Granted
Apparatus and method for mounting pellicle
AssigneeSamsung Electronics Co., Ltd.
InventorsSang-hee Lee, Jin Choi
Life of this patent
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Abstract
An apparatus and a method for mounting a pellicle includes a pellicle compression plate formed to apply a plurality of particular pressures to a plurality of points or areas of a region of the reticle where a pellicle frame of the pellicle contacts a reticle.
Claims20
An apparatus, comprising:
- a pellicle compression plate configured to apply a plurality of pressures to a plurality of areas where a pellicle frame of a pellicle contacts a reticle,
- wherein the plurality of pressures includes an adjusting pressure that is greater or smaller than the other plurality of pressures.
A method of mounting a pellicle having a pellicle frame, the method comprising:
- generating a map of a reticle by measuring a characteristic of the reticle;
- and
- applying a plurality of pressures to a plurality of areas of the reticle where the pellicle frame contacts the reticle, according to the generated map of the reticle,
- wherein the plurality of pressures includes an adjusting pressure that is greater or smaller than the other plurality of pressures.
1 more element
Dependencies are inferred from the claim text.