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US 8,133,361 B2Granted
Thin film coating system and method
AssigneeDeposition Sciences, Inc.
InventorsNorman L. Boling, Miles Rains, Howard Robert Gray
Life of this patent
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Abstract
A method and system for depositing a thin film on a substrate. In the system a target material is deposited and reacted on a substrate surface to form a substantially non-absorbing thin film. The volume of non-absorbing thin film formed per unit of time may be increased by increasing the area of the surface by a factor of “x” and increasing the rate of deposition of the target material by a factor greater than the inverse of the factor “x” to thereby increase the rate of formation of the volume of non-absorbing thin film per unit of time.
Claims15
A method of forming a non-absorbing thin film on a surface of a substrate, the method comprising:
- operating a sputtering target at a first sputtering rate of target material;
- exposing the substrate surface to the target at a first exposure rate to effect the deposition of the sputtered target material on the surface of the substrate at a first deposition rate per unit of area of substrate surface;
- increasing the rate of exposure of the substrate surface to the target;
- and
- operating the sputtering target at a second sputtering rate of the target material so that the deposition rate of sputtered target material per unit of area of substrate surface is greater than the product of (i) the ratio of the first exposure rate of the substrate surface to the increased exposure rate of the substrate surface, and (ii) the first deposition rate per unit of area of substrate surface.
2 more elements
In a coating system comprising:
- a source of material to be deposited having a selective rate of release of the material;
- a reactive atmosphere for exposing the deposited material to a reactive agent to effect reaction of the material;
- tooling for holding one or more substrates, the tooling having a capacity determining a first surface area of the substrates held thereby;
- and
- a carrier supporting the tooling for exposing the substrates held by the tooling to the source of deposition material and the reactive atmosphere at a first area per unit of time to thereby effect a first rate of depositing material per unit area of substrate,
- a method of increasing the rate of formation of substantially non-absorbing thin film on the one or more substrates, said method comprising:
- (a) increasing the capacity of the tooling to thereby increase the surface area of substrates held by the tooling;
- (b) increasing the area of the substrates exposed to the source of deposition material and the reactive atmosphere per unit of time;
- and
- (c) increasing the rate of release of the material from the source so that the rate of deposition of the material per unit area of substrate is greater than the product of (i) the ratio of the first area per unit of time exposed to the source of deposition material and the reactive atmosphere to the increased area and (ii) the first rate of depositing material per unit area of substrate.
7 more elements
In a method for forming thin films on substrates using a coating system wherein a number of atoms of an element are deposited on an area of substrate surface during a coating cycle and reacted with another element to form a thin film at a first rate of formation, where the improvement comprises:
- increasing the surface area of the substrate on which atoms are deposited and the number of atoms of the element that are deposited on the substrate surface during a coating cycle;
- and
- adjusting one or more process parameters to obtain a rate of formation of the thin film per unit area of substrate surface greater than the product of (i) the ratio of the area of the substrate surface having atoms deposited thereon during a coating cycle to the increased area, and (ii) the first rate of formation of the thin film.
In a sputter coating system comprising:
- a vacuum chamber having a coating station;
- a substrate carrier adapted for passing a plurality of substrates through the coating station, the carrier being configured to carry a first number of substrates;
- a means for introducing a reactive gas into said vacuum chamber at a predetermined rate;
- a target operating at a first predetermined power level sufficient to create a reactive atmosphere in said coating station and to plasma sputter a selected material onto substrates when passed through said coating station by said substrate carrier;
- and
- a plasma generator operating at a predetermined power level for increasing the area, density and reactivity of the reactive atmosphere in the coating station,
- a method for increasing the throughput of substrates having a non-absorbing thin film in the system comprising the steps:
- changing the configuration of the substrate carrier to carry a greater number of substrates than the first number;
- and
- operating the target at a second predetermined power level, the second power level being greater than the first power level to thereby increase the rate of plasma sputtering of the material onto the substrates.
7 more elements
In a sputter coating system comprising:
- a vacuum chamber;
- a drum rotatable about its axis for carrying a plurality of substrates mounted thereon within the vacuum chamber;
- a means for introducing a reactive gas into the vacuum chamber at a predetermined reactive gas introduction rate;
- a target operating at a target power level sufficient to create a reactive atmosphere in a portion of the chamber and to plasma sputter a selected material onto substrates when carried past the target by the rotating drum;
- and
- a plasma generator operating at a plasma generator power level sufficient to create a reactive atmosphere within a portion of the chamber,
- a method of operating the system to form a non-absorbing thin film on the substrates, said method comprising the step:
- rotating the drum at a selected frequency whereby an increase in the drum rotation frequency will result in an increase in the absorption property of the thin film when the system is operated at the predetermined reactive gas introduction rate, target power level, and plasma generator power level.
5 more elements
Dependencies are inferred from the claim text.