Dual tip atomic force microscopy probe and method for producing such a probe
AssigneeImec
InventorMarc Fouchier
Life of this patent
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Abstract
One inventive aspect is related to an atomic force microscopy probe. The probe comprises a tip configuration with two probe tips on one cantilever arm. The probe tips are electrically isolated from each other and of approximately the same height with respect to the cantilever arm. The outer surface of the tip configuration has the shape of a body with a base plane and an apex. The body is divided into two sub-parts by a gap located approximately symmetrically with respect to the apex and approximately perpendicular to the base plane. Another inventive aspect related to methods for producing such an AFM probe.
Claims16
An atomic force microscopy probe comprising:
- a tip configuration comprising two probe tips on a cantilever arm, the probe tips being electrically isolated from each other and having approximately the same height with respect to the cantilever arm, the outer surface of the tip configuration having the shape of a body with a base plane and an apex, the body being divided into two sub-parts by a gap located approximately symmetrically with respect to the apex and approximately perpendicular to the base plane,
- wherein the body is a four-walled pyramid, and wherein one diagonal of the approximately square-shaped base of the pyramid approximately coincides with the longitudinal center line of the gap.
A method of producing a probe, the probe comprising a tip configuration with two probe tips on one cantilever arm, the method comprising:
- producing an atomic force microscopy probe with a single probe tip, formed as a body with a tip and a base plane, and
- cutting the body into two sub parts along a surface approximately perpendicular to the base plane and going through the tip such that the two sub parts are separated by a gap located approximately symmetrically with respect to the tip of the body and approximately perpendicular to the base plan,
- wherein the body is a four-walled pyramid, and wherein one diagonal of the approximately square-shaped base of the pyramid approximately coincides with the longitudinal center line of the gap.
Dependencies are inferred from the claim text.