Method, system, and computer program product for implementing a direct measurement model for an electronic circuit design
AssigneeCadence Design Systems, Inc.
InventorDmitri Lapanik
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Abstract
Various embodiments of the present invention are generally directed to a method, system, and computer program product for implementing direct measurement model with simulation and calibration of manufacturing process model in the manufacturing of precision devices such as electronic integrated circuits. The method and the system determine the measured measurement result and the direct measurement information and compare the direct measurement information against the other to determine whether to adjust the process models and the empirical parameters thereof.
Claims33
A computer implemented method for implementing a direct measurement model for an electronic circuit design, comprising:
- using a computing system that comprises at least one processor and is configured for performing a process comprising:
- identifying a direct measurement model, wherein the direct measurement model simulates or emulates a metrology process without performing extraction on the electronic circuit design;
- identifying a topographic characteristic of a feature in the electronic circuit design or in a test pattern, wherein the topographic characteristic is identified by using at least a manufacturing process model which comprises a process model parameter;
- and
- determining a direct measurement information by using the direct measurement model based at least in part upon the topographic characteristic, in which
- the direct measurement information comprises a simulated or emulated measurement output of a metrology device for the metrology process.
A system for implementing a direct measurement model in an electronic circuit design, comprising:
- a computing system that comprises at least one processor and is configured for performing a process, comprising:
- identifying a direct measurement model, wherein the direct measurement model simulates or emulates a metrology process without performing extraction on the electronic circuit design;
- identifying a topographic characteristic of a feature in the electronic circuit design or in a test pattern, wherein the topographic characteristic is identified by using at least a manufacturing process model which comprises a process model parameter;
- and
- determining a direct measurement information by using the direct measurement model based at least in part upon the topographic characteristic, in which
- the direct measurement information comprises a simulated or emulated measurement output of a metrology device for the metrology process.
A computer program product that includes a non-transitory computer accessible storage medium usable by at least one processor, the non-transitory computer accessible storage medium having stored thereon a sequence of instructions which, when executed by the at least one processor, causes the at least one processor to execute a method for implementing a direct measurement model for an electronic circuit design, the method comprising:
- using a computing system that comprises the at least one processor and is configured for performing a process, the process comprising:
- identifying a direct measurement model, wherein the direct measurement model simulates or emulates a metrology process without performing extraction on the electronic circuit design;
- identifying a topographic characteristic of a feature in the electronic circuit design or in a test pattern, wherein the topographic characteristic is identified by using at least a manufacturing process model which comprises a process model parameter;
- determining a direct measurement information by using the direct measurement model based at least in part upon the topographic characteristic, in which
- the direct measurement information comprises a simulated or emulated measurement output of a metrology device for the metrology process.
Dependencies are inferred from the claim text.