Crucible heating apparatus and deposition apparatus including the same
AssigneeSamsung Mobile Display Co., Ltd.
InventorsSok-Won Noh, Tae-Min Kang, Jin-Wook Seong, Sang-Bong Lee, Seung-Mook Lee, Jin-Woo Park, Sun-Hoe Kim, Myung-Jong Jung
Life of this patent
Estimating the term…
Abstract
A crucible heating apparatus and a deposition apparatus including the same. The crucible heating apparatus includes: a crucible including a main body to house a deposition material, and a cover disposed on the main body, having a nozzle; a band coupled to the crucible, through contact parts; a thermocouple coupled to the band; a housing to house the crucible and the band; and a heater disposed inside the housing, to heat the deposition material.
Claims20
A crucible heating apparatus comprising:
- a crucible comprising,
- a main body to house a deposition material, and
- a cover disposed on the main body, having a nozzle;
- a band to insertingly couple with a lower side of a side surface of the crucible, having flexible contact parts to contact the lower side of a side surface of the crucible;
- a thermocouple having a first terminal that is connected to the band;
- a housing to house the crucible and the band, having an opening;
- and
- a heater disposed inside the housing, to heat the deposition material.
A deposition apparatus comprising:
- a chamber;
- a pattern mask disposed in an upper part of the chamber;
- and
- a crucible heating apparatus comprising,
- a crucible comprising a main body to house a deposition material, and a cover disposed on the main body, having a nozzle,
- a band to insertingly couple with a lower side of a side surface of the crucible, having flexible contact parts that contact the lower side of a side surface of the crucible,
- a thermocouple having a first terminal connected to the band,
- a housing to house the crucible and the band, having an open upper part, and
- a heater disposed inside the housing, to heat the deposition material.
A heating apparatus to heat a crucible, comprising:
- a body;
- a band to insertingly couple with a lower side of a side surface of the crucible, having flexible contact parts that are bent to contact the lower side of a side surface of the crucible;
- a thermocouple having a first terminal that is connected to the band;
- and
- a heater disposed inside the body, to heat the crucible.
Dependencies are inferred from the claim text.