Vacuum processing apparatus
AssigneeAdvanced Display Process Engineering Co., Ltd.
InventorsYoung Jong Lee, Jun Young Choi, Hyoung-Kyu Son, Jeong-Bin Lee, Gyeong-Hoon Kim, Hyung-Soo Kim, Myung-Woo Han
Life of this patent
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Abstract
Disclosed herein is a vacuum processing apparatus for performing a desired process for a substrate after establishing a vacuum atmosphere therein. More particularly, the vacuum processing apparatus includes a vacuum chamber, which is divided into a chamber body and an upper cover. The upper cover is configured to be easily opened away from and closed to the chamber body.
Claims6
A processing apparatus comprising a chamber body having a gate valve for enabling loading and unloading of a substrate and an upper cover separably disposed on the chamber body, the processing apparatus further comprising:
- a transportation hoist jig system, and
- wherein the transportation hoist jig system includes:
- a body having a polygonal column shape having an appropriate thickness, the body being centrally provided with a connecting loop;
- and
- a plurality of connecting loops provided at respective corners of a lower surface of the body to move toward a center of the body in a diagonal direction, the connecting loops being simultaneously moved inward or outward to be changed in position.
Dependencies are inferred from the claim text.