Diffuser gravity support

A substrate processing apparatus, comprising:

• a chamber body;
• a gas distribution plate disposed within the chamber body, the gas distribution plate having a first:
• surface and a second surface opposite the first surface, the gas distribution plate having a plurality of gas passages extending therethrough with at least one gas passage having a first diameter at the first surface that is less than a second diameter of the at least one gas passage at the second surface, the gas distribution plate also having at least one slot formed in the first surface that is separate and distinct from the plurality of gas passages;
• a ball stud housing disposed in the at least one slot;
• a backing plate having at least one opening extending therethrough that is axially aligned with a corresponding slot in the first surface, the backing plate spaced from the gas distribution plate to define a plenum therebetween;
• and
• at least one pivotal support member disposed through the at least one opening and coupled to the backing plate and the ball stud housing, the at least one pivotal support member movable to adjust a spacing between the first surface and the backing plate, the at least one pivotal support member comprising:
• a ball stud;
• a lower pivotal member coupled to the ball stud;
• and
• an upper pivotal member coupled to the ball stud.

A substrate processing apparatus, comprising:

• a chamber body;
• a gas distribution plate disposed within the chamber body, the gas distribution plate having a first surface and a second surface opposite the first surface, the gas distribution plate having a plurality of gas passages extending therethrough with at least one gas passage having a first diameter at the first surface that is less than a second diameter of the at least one gas passage at the second surface;
• a ball stud housing disposed in the at least one slot;
• a backing plate having at least one opening extending therethrough, the backing plate spaced from the gas distribution plate to define a plenum therebetween;
• and
• at least one pivotal support member disposed through the at least one opening and coupled to the backing plate and the ball stud housing, the at least one pivotal support member movable to adjust a spacing between the first surface and the backing plate, the at least one pivotal support member comprising:
• a ball stud;
• a lower pivotal member coupled to the ball stud;
• and
• an upper pivotal member coupled to the ball stud.